Your search returned 7 records. Click on the hyperlinks to view further details of Titles..
Magazine Name : Microelectronics Journal
Year : 2003Volume number : 34Issue:02
Polymer Residue Chemical Composition Analysis And Its Effect On Via Contact Resistance In Dual Damascene Copper Interconnects Process Integration(Article) Subject:
Dual Damascene
,
Copper Damage
Author:
Y.S
Zheng
page:
109
-
114
Design And Optimisation Of A High-Temperature Silicon Micro-Hotplate For Nanoporous Palladium Pellistors(Article) Subject:
Silicon Micro-Hotplate
,
Pellistor
Author:
S.M
Lee
page:
115
-
126
Generation Lifetime Improvement On Mos Capacitor By Fast Neutron Enhanced Intrinsic Gettering Technique(Article) Subject:
Minority-Carrier Generation Lifetime
,
Mos Capacitors
Error Page
The site has encountered
some internal problems, please contact library administration for support.