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Magazine Name : Microelectronics Journal

Year : 2003 Volume number : 34 Issue: 02

Polymer Residue Chemical Composition Analysis And Its Effect On Via Contact Resistance In Dual Damascene Copper Interconnects Process Integration (Article)
Subject: Dual Damascene , Copper Damage
Author: Y.S Zheng     
page:      109 - 114
Design And Optimisation Of A High-Temperature Silicon Micro-Hotplate For Nanoporous Palladium Pellistors (Article)
Subject: Silicon Micro-Hotplate , Pellistor
Author: S.M Lee     
page:      115 - 126
Generation Lifetime Improvement On Mos Capacitor By Fast Neutron Enhanced Intrinsic Gettering Technique (Article)
Subject: Minority-Carrier Generation Lifetime , Mos Capacitors Error Page

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